3.2.2. SEM/EDS—Scanning Electron Microscopy/Energy-Dispersive X-ray Spectroscopy

MK Marcin H. Kudzin
ZM Zdzisława Mrozińska
PU Paweł Urbaniak
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The microscopic analysis of samples was performed on a Tescan Vega 3 scanning electron microscope (Brno, Czech Republic) with the EDS Oxford Instruments (Abingdon, UK) X-ray micro analyzer. SEM microscopic examination of the surface topography was performed under high vacuum using the 20 ekV probe beam energy. The surface of each preparation was sprayed with a conductive substance (gold), while using a vacuum dust extractor (Quorum Technologies Ltd., Lewes, UK). The magnification was from 500× to 20000×.

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