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2.4. Aging Effect Verification Test

LC Liyun Chang
SY Shyh-An Yeh
SH Sheng-Yow Ho
HD Hueisch-Jy Ding
PC Pang-Yu Chen
TL Tsair-Fwu Lee
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The 17th calibration film of lot C is used for the verification test of film aging. The dose of the 17th verification film is calculated through the trained HNN that was executed by using the films of portion II, and the calculated dose is compared with the delivered dose. Here, the refit (equation (5)) is not performed, since the test lot and training lot are the same lot.

Applying the deep learning HNN method, the H value of the first calibration film of lots A and B was used to calculate the fitting parameters of equation (5), and all the other films of lots A and B and the 17th calibration lot C film will be used for the verification test of the interlot and aging effect, respectively. The percentage error between the calculated dose and the delivered dose, Ehnn, using the HNN method can be written as

where Drd will be the film doses calculated through equation (5) for lot A and lot B and Drd = H for the lot C film of the 17th calibration.

Copyright and License information:  ©2021 Liyun Chang et al.
This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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