Fabrication of wedge-shaped microfluidic chip

SW Shuibing Wang
SH Shaoli Hong
SC Shijia Cai
JL Jia Lei
JC Jinyao Chen
NZ Nangang Zhang
ZA Zhao Ai
KL Kan Liu
MT Man Tang
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The wedged-shaped microfluidic chip was built in our previous work. The fabrication method applied the wet etching technique and thermal bonding technique. The entire structure of this chip consisted of a wedge-shaped microchamber and a linear reservoir. A stepping motor equipped with the wet etching technique was applied for fabrication of the wedge-shaped microchamber. The maximum and minimum height of the wedge-shaped microfluidic chip were designed as 60 μm and 4 or 5 μm. The linear reservoir was made using a computerized numerical control (CNC) engraving instrument, and its height and width were approximately 500 μm and 200 μm, respectively.

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