Sample fabrication

DI Daria O. Ignatyeva
DK Dolendra Karki
AV Andrey A. Voronov
MK Mikhail A. Kozhaev
DK Denis M. Krichevsky
AC Alexander I. Chernov
ML Miguel Levy
VB Vladimir I. Belotelov
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A wafer of epitaxially grown two-µm-thick film of BIG (Bi0.7Gd0.3Lu2.0Ga0.8Fe4.2O12) on gadolinium gallium garnet (GGG) was cut into 1 cm × 1 cm pieces via dicing saw. The film was grown by liquid-phase-epitaxy on (001)-oriented GGG substrate at II-VI, Inc. Samples were cleaned by sonication in acetone/IPA/DI water spray and blow-dried with nitrogen. The BIG film thickness was reduced from 2 µm to 300 nm by wet etching in ortho-phosphoric acid (85% from Sigma-Aldrich) for about an hour. The acid was heated to 130 °C and stirred using a magnetic stirrer for uniform etching of the film. The thickness of the film was measured using V-vase ellipsometry. Nano-patterns were then fabricated using a 100 KeV e-beam lithography system (VISTEC EBPG 5000+). A 250 nm-thick ZEP positive e-beam resist was spin-coated on the substrate together with a 30 nm-thick Au layer on top to suppress electrical charging of the dielectric garnet film during electron-beam exposure. 2D circular disk patterns were patterned on ZEP resist by uniform e-beam exposure at a dose of 150 µC/cm2 under proximity effect correction (PEC). The Au layer was first removed by wet etching in a gold etchant solution and afterwards the resist was developed in an amyl acetate solution. The resist patterns were then transferred onto the BIG film by sputter-etching in an argon-ion milling system (Intlvac Nanoquest) with ion source parameters: beam voltage – 200 V, accelerating voltage – 24 V, beam current – 70 mA and plasma forward power – 72 Watt. The sample stage temperature was kept at 6 °C throughout the etching duration of about 90 min. The resist was then removed using resist remover N-methyl-2-pyrrolidine (NMP) by heating at 80 °C for about half an hour.

Finally, the sample was wet-etched in phosphoric acid at 130 °C for ~1 min to smoothen the side walls of the nanopillars. The higher etch rate towards the tip of the nanopillars due to stirred acid, produced the truncated-cone shape of the nanopillars. The roughness of the wet-etched surface is usually less than 1 nm for wet-etched film, however the trade-off here is the imperfect nanopillars. The AFM images are shown in Supplementary Note 3.

The film has in-plane anisotropy with in-plane saturation field of Hin = 30 Oe, out-of-plane saturation field of Hout = 2 kOe, and saturation magnetization 4πMs=860G.

Iron-garnet film was described by the following spectral dependence of permittivity and gyration constant:

and g=0.81020.004λ+6.4106λ25109λ3+141013λ4), (λ in µm) which was obtained previously for a similar smooth film38.

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