Fabrication and measurements of OLEDs

ZW Zheng-Guang Wu
YJ Yi-Ming Jing
GL Guang-Zhao Lu
JZ Jie Zhou
YZ You-Xuan Zheng
LZ Liang Zhou
YW Yi Wang
YP Yi Pan
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Indium-tin-oxide (ITO) coated glass with a sheet resistance of 10 Ω/sq was used as the anode substrate. Prior to film deposition, patterned ITO substrates were cleaned with detergent, rinsed in de-ionized water, dried in an oven, and finally treated with oxygen plasma for 5 minutes at a pressure of 10 Pa to enhance the surface work function of ITO anode (from 4.7 to 5.1 eV). All the organic layers were deposited with the rate of 0.1 nm/s under high vacuum (≤2 × 10−5 Pa). The doped layers were prepared by co-evaporating dopant and host material from two individual sources, and the doping concentrations were modulated by controlling the evaporation rate of dopant. MoO3, LiF and Al were deposited in another vacuum chamber (≤8.0 × 10−5 Pa) with the rates of 0.01, 0.01 and 1 nm s−1, respectively, without being exposed to the atmosphere. The thicknesses of these deposited layers and the evaporation rate of individual materials were monitored in vacuum with quartz crystal monitors. A shadow mask was used to define the cathode and to make ten emitting dots (with the active area of 10 mm2) on each substrate. Device performances were measured by using a programmable Keithley source measurement unit (Keithley 2400 and Keithley 2000) with a silicon photodiode. The EL spectra were measured with a calibrated Hitachi F–7000 fluorescence spectrophotometer. Based on the uncorrected EL fluorescence spectra, the Commission Internationale de l’Eclairage (CIE) coordinates were calculated using the test program of Spectrascan PR650 spectrophotometer. The EQE of EL devices were calculated based on the photo energy measured by the photodiode, the EL spectrum, and the current pass through the device.

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