Surface coverage analysis

HC Hai Cao
DW Deepali Waghray
SK Stefan Knoppe
WD Wim Dehaen
TV Thierry Verbiest
SF Steven De Feyter
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Surface coverage and size distribution of islands on surface were calculated by the SPIP software (Image Metrology, Denmark) with the ‘particle & pore analysis’ function. It was done in two steps. At the first step, the islands were detected by the software automatically. Then noise was removed and if necessary some islands were mapped out manually. The second step is particularly important when step edges are present. The area of each island was calculated by the software and used for further analysis. An example is shown in Supplementary Fig. 17.

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