The vibration mode was calculated by a finite element method, using the Pressure acoustic and Solid mechanics interaction modulus in COMSOL Multiphysics 3.5. The FEM analysis used an integrated device structure model (Supplementary Fig. 17a) consisting of two PET films and a layer of PVDF as active layer. The geometries were set the same as the actual values. Due to the complexity of nanofibrous structure, the PVDF nanofibre web was simplified into a low-density film with the density of 450 kg m−3. The commercial PVDF film and PET film have a density of 1,780 kg m−3 and 1,380 kg m−3, respectively. The Young's modulus of the simplified nanofibre web, dense PVDF film and PET films were set at 1,450 and 500 MPa, and Poisson's ratio 0.42, 0.35 and 0.35, respectively.
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