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AFM surface reconstruction

MG Maxim V. Gorkunov
OR Oleg Y. Rogov
AK Alexey V. Kondratov
VA Vladimir V. Artemov
RG Radmir V. Gainutdinov
AE Alexander A. Ezhov
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Precise reconstruction of the relief is carried out on NT-MDT NTEGRA Prima system in the tapping mode using custom sharpened vertical probes. The measurements of the metasurface after FIB patterning include flat unprocessed SOS areas and the obtained height profiles are normalized with respect to them. Calibrated 300 nm thickness of the SOS layer is used to recalculate the heights from the bottom Si/Al2O3 interface. The height map of the top of the annealed metasurface is normalized according to the FIB 3D reconstruction data. All obtained AFM images are processed with a specific numerical routine that includes a subtraction of the tip curvature radius, noise reduction, and a two-step averaging over all unit cells and their 4-fold rotations42,51.

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