MBE Setup and Material Growth

MC Ming-Wei Chen
DO Dmitry Ovchinnikov
SL Sorin Lazar
MP Michele Pizzochero
MW Michael Brian Whitwick
AS Alessandro Surrente
MB Michał Baranowski
OS Oriol Lopez Sanchez
PG Philippe Gillet
PP Paulina Plochocka
OY Oleg V. Yazyev
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The growth was carried out in an Omicron MBE (Lab 10) with a ∼10–10 mbar base pressure. Cleaved 1 × 1 cm2 GaAs(111)B substrates were outgassed at up to 500 °C for at least 30 min. The native oxide was removed from the surface of GaAs(111)B by heating it to 350 °C under a flux of atomic hydrogen. Hydrogen molecules were dissociated by a tungsten filament with Joule heating at 70 W and were introduced into the chamber via a leak valve. The procedure lasted 30 min or more at base pressure of ∼3 × 10–7 mbar, resulting in sharp streaks in RHEED. A Kundsen cell and an electron beam source (EFM-3 from Omicron) were used for Se and Mo evaporation, respectively. The flux rates were calibrated using a quartz crystal microbalance, and the flux ratio of Se/Mo was optimized to be ∼40 for growth. A RHEED camera (Staib Co.) was used to monitor the growth in situ. The growth temperature was optimized in the 470–530 °C temperature range. Post-annealing at up to 550 °C was performed in Se atmosphere. Higher temperature leads to GaAs decomposition and increased surface roughness.

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