Catalytic Activity Evaluation and Analytical Methods.

CF₄ hydrolysis was measured by using a continuous flow reaction system with a quartz fixed-bed reactor (i.d. 20 mm) under atmospheric pressure in a temperature range from 440 to 660 °C. A gas flow of 33.3 mL min⁻¹ (0.25% CF₄ in Ar) controlled by a mass flow controller, together with 0.2 mL h⁻¹ of water pumped by an injection pump, were passed over 2.0 g of catalyst. According to the following equations, the CF₄ decomposition is calculated:

where [CF₄]_in and [CF₄]_out indicate the input and output relative gas concentrations, respectively.