1H,1H,2H,2H-Perfluorodecyltrimethoxysilane (FDTS, CAS# 83048-65-1, Dow Corning Co.) was deposited on etched aluminum surfaces using vapor-phase deposition. Samples were first rinsed with acetone, IPA, and de-ionized water, dried in a clean nitrogen (N2) flow, and cleaned with plasma cleaner. Then, samples and a 50 mL beaker containing 1 mL of FDTS toluene solution (5% v/v) were sealed in a glass container and heated in an atmospheric pressure oven (Lindberg Blue M) at 80 °C for 3 h. This process allowed for the development of a highly conformal (monolayer thick) silane layer on surfaces.
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