Fabrication of fluorinated-silane modified etched aluminum sample

JM Jingcheng Ma
LP Laura E. Porath
MH Md Farhadul Haque
SS Soumyadip Sett
KR Kazi Fazle Rabbi
SN SungWoo Nam
NM Nenad Miljkovic
CE Christopher M. Evans
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1H,1H,2H,2H-Perfluorodecyltrimethoxysilane (FDTS, CAS# 83048-65-1, Dow Corning Co.) was deposited on etched aluminum surfaces using vapor-phase deposition. Samples were first rinsed with acetone, IPA, and de-ionized water, dried in a clean nitrogen (N2) flow, and cleaned with plasma cleaner. Then, samples and a 50 mL beaker containing 1 mL of FDTS toluene solution (5% v/v) were sealed in a glass container and heated in an atmospheric pressure oven (Lindberg Blue M) at 80 °C for 3 h. This process allowed for the development of a highly conformal (monolayer thick) silane layer on surfaces.

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