Samples are prepared by electron beam lithography, lift-off processing, and sputter deposition. A 10-μm-wide gold stripline is prepared on a GaAs wafer (13). On top of the stripline, a much wider trilayer (Ta 15 nm/Ni8057Fe20 13 nm/Ta 3 nm) is deposited in which the iron is enriched to 95% in the isotope 57Fe. The trilayer is electrically insulated from the gold stripline by a hydrogen silsesquioxane (HSQ) film that also flattens the surface of the stripline. All parts of the ferromagnetic film that do not overlap the stripline are covered with an additional gold layer, such that only the excited part of the ferromagnetic film contributes to the nuclear reflectivity.

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