The fluidic chamber was fabricated by attaching multiple layers of ring-shaped polyimide Kapton tape (5 mm in inner diameter, thickness of 60 μm) onto a single-side polished silicon wafer (thickness of 500 μm). A microscope coverslip (thickness of 100 μm) was used to cover the cylindrical chamber after filling it with solution. The height of the chamber was adjusted by changing the number of Kapton tape layers. A piezo ceramic transducer (10 MHz; STEMiNC Inc.) was glued to the opposite side of the silicon wafer using Aquasonic 100 Ultrasound Transmission Gel and was fixed by a clamp. This 10-MHz transducer was chosen to ensure a uniform acoustic pressure output in the frequency range of 1 to 3 MHz (fig. S8). The magnetic field was generated by using a cylindrical magnet (DEE, K&J Magnetics Inc., USA), which was placed under the chamber. The distance between the magnet and the chamber was about 10 cm. The thin nickel layer in the microswimmer aligned perpendicular to the axial direction of the magnet in this magnetic field.

Experiments were conducted with an Olympus BX60 light microscope. Images and videos were captured by a USB camera (Flea3, Flir Integrated Imaging Solutions Inc., Canada) mounted on the microscope and were analyzed by using open-source software, ImageJ (National Institutes of Health, USA). The acoustic transducer was driven by an radio frequency (RF) signal function generator (33120A, Agilent, USA). The acoustic pressure in the fluidic chamber was characterized using a hydrophone (HGL-0085, Onda Inc., USA) at a distance of ~13 mm from the surface of the silicon wafer and calculated on the basis of an attenuation coefficient of 0.00015 Neper/cm.

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