Transition between TiO2 and black TiO2
This protocol is extracted from research article:
TiO2 metasurfaces: From visible planar photonics to photochemistry
Sci Adv, Nov 1, 2019; DOI: 10.1126/sciadv.aax0939

The TiO2 metasurfaces were transferred to black TiO2 metasurfaces in an ICP (Oxford Instruments Plasma Technology 380) treatment system. The chamber was pumped to reach a degree of vacuum of around 10−9 torr. Then, the metasurfaces were implanted with H+ plasma with a flow rate of 50 standard cubic centimeters per minute. Meanwhile, the chamber pressure was stabilized at 15 mtorr, and the temperature of the platform was maintained at 70°C. The ICP power was 700 W, and the radio frequency (RF) power was 10 W. Under the same conditions, the black TiO2 can be oxidized back to TiO2 by using O plasma.

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