SEM images of the SiN film with particles from osteoblasts were observed using JSM-5600LV and JED2140 EDX spectrometric systems (JEOL, Japan) by 15 kV and 50 to 100 pA. The EDX spectroscope data and the element map images were detected by 10 kV and 200- to 300-pA current of EB. The observation times of spectrum and map were 100 and 1000 s, respectively.

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