The THz QCL structure was grown by molecular beam epitaxy. The active region comprises 180 periods, resulting in a total thickness of 12 μm. The THz QCL was processed into a metal-metal waveguide, where the active region is sandwiched between two metal stripes, with 150-μm-wide ridges, cleaved into 3-mm-long cavities, and indium-soldered to copper mounts. As the top of the QCL comprises a metal layer for mode confinement, apertures need to be etched into this metal layer for the NIR to propagate into the device and enable interband excitations in this geometry. The aperture positions were judiciously designed via numerical simulations of the THz field intensity in the QCL cavity such that the QCL performance is not affected, and there is an overlap between the interacting NIR and THz electric fields. Results of these simulations are presented in fig. S1, where a two-slit configuration (1-mm-long, 3-μm-wide slits separated by 45 μm) is chosen because the fundamental and first excited modes are found to have a consequential field under the apertures (see Fig. 3A). The two-slit configuration was realized by focused ion beam etching. The QCL output power and voltage-current characteristics were found to be very similar after etching the slits to those before etching. We note that the emitted angle of the generated NIR beam is expected to be similar to that of the NIR pump because the THz k-vector is small compared to that of the NIR.

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