XPS measurements were performed with a PHI VersaProbe II scanning XPS microprobe using a monochromatic Al Kα x-ray of 24.8-W power with a beam size of 100 μm. Core-level signals were obtained at 45° take-off angle. All peaks were calibrated using C 1s peak at 284.8 eV to correct charge shift of binding energies. Curve fitting was performed using the PHI MultiPak software. Depth profiling etching speed was calibrated using Si as standard. The top-view and cross-sectional morphologies of the films were characterized using a high-resolution scanning electron microscope (Zeiss Merlin) with an in-lens detector.

Note: The content above has been extracted from a research article, so it may not display correctly.

Please log in to submit your questions online.
Your question will be posted on the Bio-101 website. We will send your questions to the authors of this protocol and Bio-protocol community members who are experienced with this method. you will be informed using the email address associated with your Bio-protocol account.

We use cookies on this site to enhance your user experience. By using our website, you are agreeing to allow the storage of cookies on your computer.