To characterize the structure and ALD infill uniformity of the NC networks, we prepared TEM cross-sectional lamellae using an FEI Helios NanoLab G4 dual-beam focused ion beam and subsequently studied them using scanning TEM (STEM) and energy-dispersive x-ray (EDX) spectroscopy. An aberration-corrected FEI Titan G2 60-300 STEM equipped with a Super-X EDX spectrometer was operated at 60 kV with a convergence semiangle of 25 mrad and a beam current of 120 pA. Spatially resolved STEM-EDX maps were collected with 1024 pixels by 1024 pixels over 450 nm by 450 nm areas, a dwell time of 4 μs/pixel, an acquisition time of 10 min, and drift correction after every frame. The Zn, Al, O, Si, and C K-edges were background-subtracted and integrated, producing spectral images. A three-pixel Gaussian blur was applied to the final spectral images to reduce noise and aid in visualization.

Note: The content above has been extracted from a research article, so it may not display correctly.

Please log in to submit your questions online.
Your question will be posted on the Bio-101 website. We will send your questions to the authors of this protocol and Bio-protocol community members who are experienced with this method. you will be informed using the email address associated with your Bio-protocol account.

We use cookies on this site to enhance your user experience. By using our website, you are agreeing to allow the storage of cookies on your computer.