To characterize the structure and ALD infill uniformity of the NC networks, we prepared TEM cross-sectional lamellae using an FEI Helios NanoLab G4 dual-beam focused ion beam and subsequently studied them using scanning TEM (STEM) and energy-dispersive x-ray (EDX) spectroscopy. An aberration-corrected FEI Titan G2 60-300 STEM equipped with a Super-X EDX spectrometer was operated at 60 kV with a convergence semiangle of 25 mrad and a beam current of 120 pA. Spatially resolved STEM-EDX maps were collected with 1024 pixels by 1024 pixels over 450 nm by 450 nm areas, a dwell time of 4 μs/pixel, an acquisition time of 10 min, and drift correction after every frame. The Zn, Al, O, Si, and C K-edges were background-subtracted and integrated, producing spectral images. A three-pixel Gaussian blur was applied to the final spectral images to reduce noise and aid in visualization.

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