The capacitance voltage measurement was performed with a Wafer Profiler CVP21, using 0.1 M ammonium bifluoride (ABF or NH4-H-F2) as an electrolyte, allowing for electrical contact to the sample. The 0.1 M solution was made by diluting a 1 M solution in deionized (DI) water by a ratio of 1:9 (1 M ABF:DI water). During the measurement, a voltage was applied, resulting in the ABF contacting the wafer to form localized HF, which was used to etch the sample.

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