Chemicals
Fabrication of c-Si solar cell
Preparation of ALD-TiO2 layer
Standard ITO recombination layer deposition
Preparation of the perovskite solar cell
Contact resistivity measurement
Si lifetime measurements
Hall effect measurement
Atomic force microscopy
Electron microscopy
X-ray diffraction
X-ray photoelectron spectroscopy
UV light photoelectron spectroscopy
Inverse photoemission spectroscopy
Optical measurement
Photovoltaic performance measurement
EQE measurements
The capacitance voltage measurement was performed with a Wafer Profiler CVP21, using 0.1 M ammonium bifluoride (ABF or NH4-H-F2) as an electrolyte, allowing for electrical contact to the sample. The 0.1 M solution was made by diluting a 1 M solution in deionized (DI) water by a ratio of 1:9 (1 M ABF:DI water). During the measurement, a voltage was applied, resulting in the ABF contacting the wafer to form localized HF, which was used to etch the sample.