To evaluate the efficacy in intracellular nanoinjection and siRNA delivery, the established Si NN-patch was tested on a range of biological cells including breast cancer cells (MCF7, ATCC, USA), human dermal fibroblasts (HDF, ATCC, USA), and ovarian carcinoma cells (SKOV3, ATCC, USA). For these tests, a test bed Si NN-patch was sterilized in 70% (v/v) ethanol for 30 min, washed twice in PBS (Gibco, USA), and dried under ultraviolet (UV) irradiation for 1 hour. The Si NN-patch was then immersed in a solution of 2% 3-aminopropyltriethoxysilane (Sigma-Aldrich, USA) for 2 hours to functionalize the surface of Si NNs and capture nucleic acids (Cy3-siRNA, Invitrogen, USA). The sequences for the siRNA used in this study are as follows: 5′-GGAGCAGUUUGAAUGUCCAtt-3′ (sense) and 5′-UGGACAUUCAAACUGCUCCga-3′ (antisense). Following rinsing with PBS, the cells were interfaced with the Si NN-patch either by seeding them over Si NNs (that is, Si NNs at the bottom) or by pressing the Si NN-patch over cells with centrifugal force at 500 rpm for 1 min (that is, Si NNs on top).

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