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The ultrastable amorphous Teflon films were produced by VPD (4, 7). The weight-average molecular weights for the virgin and VPD amorphous Teflon were 500,000 and 100,000 g/mol, respectively (7). The reduced molecular weight for the VPD films was attributed to thermal degradation during the VPD process, including a repolymerization step (7). Details are provided in (7). Here, 110- to 200-nm-thick amorphous Teflon films were deposited onto mica sheets. During the deposition, the substrate temperature was maintained at 0.85 Tg, and the deposition rate was set to 0.1 nm/s. The Tf was measured by flash DSC. The Tf for the stable glass was 75°C, and that for the rejuvenated sample was 130°C.

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