The AFM device (Nano Search, Shimadzu) was used, which combined optical and laser microscopes. All SEM measurements (using a Hitachi SU8220 microscope) were performed at an acceleration voltage of 2.0 kV and emission current of 10 μA. Magnifications of ×3000, ×6000, and ×7000 were used to acquire Fig. 5C, Fig. 5D, and Fig. 5 (A and B), respectively.

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