Fabrication of quadruple electrodes
This protocol is extracted from research article:
Visible light–gated reconfigurable rotary actuation of electric nanomotors
Sci Adv, Sep 14, 2018; DOI: 10.1126/sciadv.aau0981

A glass slide was cleaned by sonication for 3 min sequentially in acetone, IPA, and DI water. Then, 5-nm Cr and 100-nm Au films were deposited onto the glass substrate via electron-beam evaporation. We made a quadruple microelectrode on the glass slide with a standard photolithography process by using S1811 photoresist, designed photomasks, and commercially available Au/Cr etchant. The microelectrode was obtained after the removal of the photoresist with acetone. The microelectrodes were connected to external electronics by silver paste–attached wires.

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