Waveguide arrays were prepared by steering a femtosecond laser (10 W, 1026 nm; pulse duration, 290 fs; repetition rate, 1 MHz; working frequency, 513 nm) into a spatial light modulator (SLM) to create burst trains onto a borosilicate substrate with a 50× objective lens (numerical aperture, 0.55) at a constant velocity of 10 mm/s. Power and SLM compensation were processed to ensure the waveguides to be uniform and depth-independent (40). The borosilicate glass wafer was 1 × 20 × 20 mm in size and consisted of 20 sets of lattices of different evolution lengths from 0.31 to 9.81 mm. Each set of lattice had 49 × 49 waveguides 0.72 mm × 0.648 mm big in the cross-sectional view.

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